Effect of atmosphere during heating of substrate on the low temperature deposition of metalorganic chemical vapor deposited Pb(Zrx,Ti1−x)O3 thin films-Reference-Cited by-同舟云学术

Effect of atmosphere during heating of substrate on the low temperature deposition of metalorganic chemical vapor deposited Pb(Zrx,Ti1−x)O3 thin films

Published:2002-07-29 Issue:5 Volume:81 Page:898-900
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Tokita Kouji,Aratani Masanori,Funakubo Hiroshi

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1497446

Reference11 articles.

1. Fabrication and applications of piezo-and ferroelectric films

2. Preparation of Pb(Zrx, Ti1-x)O3Thin Films by Source Gas Pulse-Introduced Metalorganic Chemical Vapor Deposition

3. Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method

4. Structural development in the early stages of annealing of sol–gel prepared lead zirconate titanate thin films

5. Lowering of crystallization temperature of sol-gel derived Pb(Zr, Ti)O3 thin films

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