Excimer laser annealing of silicon nanowires

Author:

Misra Nipun,Xu Li,Pan Yaoling,Cheung Nathan,Grigoropoulos Costas P.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Laser-matter interactions;Laser Annealing Processes in Semiconductor Technology;2021

2. Highly focused femtosecond laser directed selective boron doping in single SiC nanowire device for n-p conversion;Applied Physics Letters;2019-09-23

3. Atomistic Mechanisms for the Thermal Relaxation of Au -hyperdoped Si;Physical Review Applied;2019-08-08

4. Using optical resonances to control heat generation and propagation in silicon nanostructures;Physical Chemistry Chemical Physics;2019

5. Communication—Co-Planar Structured Nano-Resistor Devices;ECS Journal of Solid State Science and Technology;2019

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