Efficient negative ion production in rf plasmas using a mesh grid bias method
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Reference12 articles.
1. Electron cyclotron resonance negative ion source
2. Cesium injection into a large rf‐driven hydrogen negative‐ion source
3. Overview of the RF source development programme at IPP Garching
4. Numerical studies on the optimisation of volume-produced H-ions in the single-chamber system
5. Isotope Effect of H–/D– Volume Production in Low-Pressure H2/D2 Plasmas– Measurement of VUV Emissions and Negative Ion Densities
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region;Journal of Applied Physics;2012-09-15
2. Generation of cold electrons in the downstream region of a microwave plasma source with near boundary resonances for production of negative ions;Indian Journal of Physics;2011-12
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