Highly efficient microwave coupling devices for remote plasma applications
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1144519
Reference17 articles.
1. Stable Nitrogen Isotope Analysis by Optical Spectroscopy
2. The design of a microwave plasma cavity
3. Microwave-Supported Discharges
4. A Review of Instrumentation Used to Generate Microwave-Induced Plasmas
5. A Small Microwave Plasma Source for Long Column Production without Magnetic Field
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1. Polymer Functionalization and Thin Film Deposition by Remote Cold Nitrogen Plasma Process;Journal of Adhesion Science and Technology;2008-01
2. Elaboration of fire retardant coatings on polyamide-6 using a cold plasma polymerization process;Surface and Coatings Technology;2002-03
3. Thermal stability and flammability studies of coated polymer powders using a plasma fluidized bed process;Journal of Materials Science;2002
4. Excitation of N2(B3Pig) in the nitrogen short-lived afterglow;Journal of Physics D: Applied Physics;1999-07-26
5. Rectangular 915 MHz mode plasma cavity: characterization and diagnostics in dinitrogen;Plasma Sources Science and Technology;1998-11-01
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