Photoemission measurements of graded barrier in thin silicon oxynitride films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334377
Reference12 articles.
1. Advantages of thermal nitride and nitroxide gate films in VLSI process
2. Graded or stepped energy band‐gap‐insulator MIS structures (GI‐MIS or SI‐MIS)
3. A nitride-barrier avalanche-injection EAROM
4. The Analysis of Photoelectric Sensitivity Curves for Clean Metals at Various Temperatures
5. INTERPRETATION OF LOW‐VOLTAGE PHOTOMEASUREMENTS IN METAL‐INSULATOR‐METAL FILMS
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1. Highly Reliable MIS Capacitors With Plasma Nitridation and Doubled Dielectric-Constant Tantalum Pentoxide;IEEE Transactions on Electron Devices;2005-08
2. Thermally Nitrided Oxides: for Flash Memories;Gate Dielectrics and MOS ULSIs;1997
3. Auger electron spectroscopy and capacitance-voltage investigation of the AlN-Si interface;Thin Solid Films;1987-02
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