High-spatial-resolution scanning capacitance microscope using all-metal probe with quartz tuning fork
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1791342
Reference13 articles.
1. Visualization of 0.1-μm-metal-oxide-semiconductor field-effect transistors by cross-sectional scanning tunneling microscopy
2. Silicon dopant imaging by dissipation force microscopy
3. Scanning capacitance microscopy imaging of silicon metal-oxide-semiconductor field effect transistors
4. Study on poly depletion in sub-0.1 μm metal–oxide–semiconductor field effect transistors by scanning capacitance microscopy
5. Simulation of scanning capacitance microscopy measurements on ultranarrow doping profiles in silicon
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