Improved process for liquid phase deposition of silicon dioxide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111759
Reference3 articles.
1. A New Process for Silica Coating
2. Novel technique for SiO/sub 2/ formed by liquid-phase deposition for low-temperature processed polysilicon TFT
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