Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition-Reference-Cited by-同舟云学术

Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition

Published:2014-06-07 Issue:21 Volume:115 Page:214908
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Mei A. B.¹,Wilson R. B.¹,Li D.¹,Cahill David G.¹,Rockett A.¹,Birch J.²,Hultman L.²,Greene J. E.¹²,Petrov I.¹²

Affiliation:

1. Department of Materials Science and the Frederick-Seitz Materials Research Laboratory University of Illinois, 104 South Goodwin, Urbana, Illinois 61801, USA

2. Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-58183 Linköping, Sweden

Funder

Swedish Research Council (VR) and the Swedish Government Strategic Research Area Grant in Materials Science (SFO Mat-LiU) on Advanced Functional Materials

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4881817

Reference68 articles.

1. The structure of β-vanadium nitride

2. Application of thin nanocrystalline VN film as a high-performance diffusion barrier between Cu and SiO[sub 2]

3. Study of ultrathin vanadium nitride as diffusion barrier for copper interconnect

4. Vanadium nitride as a novel thin film anode material for rechargeable lithium batteries

5. Reactive magnetron sputter deposition of polycrystalline vanadium nitride films

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