High-performance broadband graphene/silicon/graphene photodetectors: From x-ray to near-infrared

Author:

Liu Xinyu1ORCID,Ning Hao1,Lv Jianhang1ORCID,Liu Lixiang1,Peng Li12,Tian Feng1ORCID,Bodepudi Srikrishna Chanakya1ORCID,Wang Xiaochen1,Cao Xiaoxue1,Dong Yunfan1,Fang Wenzhang2ORCID,Wu Shaoxiong1,Hu Huan1ORCID,Yu Bin1,Xu Yang1ORCID

Affiliation:

1. School of Micro-Nano Electronics, ZJU-Hangzhou Global Scientific and Technological Innovation Center, State Key Laboratory of Silicon Materials, ZJUI Institute, Zhejiang University 1 , Hangzhou 310027, China

2. Department of Polymer Science and Engineering, MOE Key Laboratory of Macromolecular Synthesis and Functionalization, Key Laboratory of Adsorption and Separation Materials & Technologies of Zhejiang Province, Zhejiang University 2 , Hangzhou 310027, China

Abstract

Metal–semiconductor–metal (MSM) structures have been widely used and extensively investigated for ultraviolet (UV) detection. However, traditional MSM structures suffer from large dark currents, narrow detection bands, and low collection efficiency. Optimizing these properties for broadband detection in MSM structures is essential for improving the performance and functionality in broader optoelectronics applications. We report a high-performance broadband graphene/thin silicon/graphene photodetector by realizing a synergistic combination of graphene and silicon absorption bandwidths from the x-ray to near-infrared regions. The sensitivity of the proposed photodetector in this spectral range is greatly enhanced. A high responsivity of 0.56 A/W, a high detectivity of 2.72 × 1011 Jones, and a fast response time of 7.2 ns are achieved. Moreover, the real-time array imaging at broadband regions presented in this study can benefit from the independent pixel structures similar to the complementary-metal-oxide-semiconductor (CMOS) architecture. This approach constitutes a reliable route toward a high-performance photodetector with prominent broad-spectrum response, high responsivity, and low noise. These results will motivate strategies to achieve high-performance, broadband image sensors, compatible for on-chip CMOS circuit technology that advances the development of next-generation graphene/silicon image sensors.

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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