Formation of Al‐nitride films at room temperature by nitrogen ion implantation into aluminum
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329474
Reference18 articles.
1. VACUUM DEPOSITION OF AlN ACOUSTIC TRANSDUCERS
2. Aluminium nitride thin films and their properties
3. Nonlinear optical susceptibilities of AlN film
4. Optical properties of aluminium nitride prepared by chemical and plasmachemical vapour deposition
5. The optical absorption edge of single‐crystal AlN prepared by a close‐spaced vapor process
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