1. Department of Physics, Stockholm University, AlbaNova University Center, 10691 Stockholm, Sweden
2. Photon Science, Deutsches Elektronen-Synchrotron DESY, Notkestr. 85, 22607 Hamburg, Germany
3. DESY NanoLab, Deutsches Elektronen-Synchrotron DESY, 22607 Hamburg, Germany
4. Research Centre for Mikrotechnology, University of Applied Sciences, Hochschulstrasse 1, 6850 Dornbirn, Austria
5. Teknikvetenskap Royal Institute of Technology (KTH), Teknikringen 8D, SE-100 44 Stockholm, Sweden
6. Scienta Omicron AB, P.O. Box 15120, SE-750 15 Uppsala, Sweden