AlN texturing and piezoelectricity on flexible substrates for sensor applications-Reference-Cited by-同舟云学术

AlN texturing and piezoelectricity on flexible substrates for sensor applications

Published:2015-06-08 Issue:23 Volume:106 Page:232903
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Smecca Emanuele¹,Maita Francesco²,Pellegrino Giovanna¹,Vinciguerra Vincenzo³,La Magna Luigi³,Mirabella Salvo⁴^ORCID,Maiolo Luca²^ORCID,Fortunato Guglielmo²,Condorelli Guglielmo G.⁵,Alberti Alessandra¹

Affiliation:

1. CNR-IMM, Zona Industriale Strada VIII, n°5, 95121 Catania, Italy

2. CNR-IMM, Via del Fosso del Cavaliere 100, 00133 Roma, Italy

3. STMicroelectronics, Stradale Primosole 50, 95121 Catania, Italy

4. CNR-IMM, Matis Via Santa Sofia n°64, 95123 Catania, Italy

5. Dipartimento di Scienze Chimiche, Università degli Studi di Catania, V.le A.Doria 6, 95125 Catania, Italy

Funder

Ministero dell'Istruzione, dell'Università e della Ricerca (Ministry of Education, University and Research)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4922229

Reference27 articles.

1. Thin Film Piezoelectrics for MEMS

2. New materials for micro-scale sensors and actuators

3. Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

4. Piezoelectric coefficient of aluminum nitride and gallium nitride

5. First-principles calculation of the piezoelectric tensor d⇊ of III–V nitrides

Cited by 37 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High piezoelectricity Janus GaXI (X = S, Se, or Te): First-principles calculations;Solid State Communications;2024-11

2. Advanced HVPE sublimation sandwich method for Si layer formation on SiC substrates;Journal of the Korean Physical Society;2024-09-04

3. Orbital hybridization and defective states of vacancy defects in AlN;Materials Today Communications;2024-06

4. Sputtered Piezoelectric Films as Materials for Flexible Devices and Sensors: A Review;IEEE Sensors Journal;2024-01-01

5. Recent Progress in Polymeric Flexible Surface Acoustic Wave Devices: Materials, Processing, and Applications;Advanced Materials Technologies;2023-08-15