1. Key Laboratory of Micro/Nano and Ultra-Precision Manufacturing (Jilin Province), School of Mechatronic Engineering, Changchun University of Technology 1 , Changchun, Jilin 130012, People’s Republic of China
2. 2 Key, Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun, Jilin 130025, People’s Republic of China
3. School of Mechanical and Vehicle Engineering, Changchun University 3 , Changchun, Jilin 130022, People’s Republic of China
4. Institute of Precision Machinery, Zhejiang Normal University 4 , Jinhua, Zhejiang 321004, People’s Republic of China