Formation of location-controlled crystalline islands using substrate-embedded seeds in excimer-laser crystallization of silicon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1402641
Reference10 articles.
1. Polysilicon thin-film transistors with channel length and width comparable to or smaller than the grain size of the thin film
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3. Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
4. Single-crystal Si films for thin-film transistor devices
5. Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
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