High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging
Author:
Affiliation:
1. Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA
2. Photronics, Cheonan, Choongnam 31075, South Korea
Abstract
Publisher
AIP Publishing
Subject
Computer Networks and Communications,Atomic and Molecular Physics, and Optics
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0102413
Reference52 articles.
1. Wide-field, high-resolution Fourier ptychographic microscopy
2. Fourier ptychography: current applications and future promises
3. High-resolution and large field-of-view Fourier ptychographic microscopy and its applications in biomedicine
4. Concept, implementations and applications of Fourier ptychography
5. Fourier ptychography for high space-bandwidth product microscopy
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Far‐Field Synthetic Aperture Imaging via Fourier Ptychography with Quasi‐Plane Wave Illumination;Advanced Photonics Research;2023-08
2. Optical ptychography for biomedical imaging: recent progress and future directions [Invited];Biomedical Optics Express;2023-01-03
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