Investigation of plasma diagnostics using a dual frequency harmonic technique
Author:
Affiliation:
1. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, South Korea
2. Department of Electrical Engineering, Hanyang University, Seoul, South Korea
Funder
Basic Science Research Program of the National Research Foundation of Korea
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4894517
Reference12 articles.
1. A FULLY AUTOMATIC CONTINUOUS ELECTRON TEMPERATURE MEASUREMENT SYSTEM USING A DOUBLE LANGMUIR PROBE
2. Exhaust studies in dite: Fast langmuir probe measurements in the boundary layer
3. Novel Langmuir probe technique for the real‐time measurement of the electron temperature
4. On the harmonic technique to measure electron temperature with high time resolution
5. Floating probe for electron temperature and ion density measurement applicable to processing plasmas
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1. Simultaneous measurements of plasma parameters and blob characteristics at the far-SOL region using a hybrid probe in KSTAR;Fusion Engineering and Design;2021-11
2. Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation;Journal of Physics D: Applied Physics;2019-07-02
3. Influence of the bias signal amplitude and frequency on the harmonic probe measurements in plasma diagnostics;Physics of Plasmas;2016-08
4. The radio-frequency fluctuation effect on the floating harmonic method;Physics of Plasmas;2016-08
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