Photoacoustic characterization of the mechanical properties of thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1434303
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1. Flexural plate wave resonator excited with Lorentz forces
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5. Measurement of Mechanical Properties in Small Dimensions by Microbeam Deflection
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