Understanding leakage currents through Al2O3 on SrTiO3
Author:
Affiliation:
1. The Andrew & Erna Viterbi Department of Electrical Engineering, Technion—Israel Institute of Technology, Haifa 32000, Israel
Funder
Israel Science Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5119703
Reference57 articles.
1. Density of Nanometrically Thin Amorphous Films Varies by Thickness
2. Size Effect on the Short Range Order and the Crystallization of Nanosized Amorphous Alumina
3. Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
4. High-K materials and metal gates for CMOS applications
5. The distribution of chemical elements in Al- or La-capped high-κ metal gate stacks
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Enhanced superconductivity in SrTiO3 -based interfaces via amorphous Al2O3 capping;Physical Review Materials;2024-08-08
2. Patterning functional oxides: Some failures and solutions in fabricating a Hall bar;Journal of Vacuum Science & Technology B;2024-07-01
3. Scalable and highly tunable conductive oxide interfaces;APL Materials;2023-11-01
4. Low Leakage in High‐k Perovskite Gate Oxide SrHfO3;Advanced Electronic Materials;2023-04-17
5. Carrier Generation;Semiconductor Physics;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3