Effects of hydrogen implantation damage on the performance of InP/InGaAs/InP p-i-n photodiodes transferred on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3062848
Reference18 articles.
1. Optical interconnections for VLSI systems
2. Optoelectronic Devices and Material Technologies for Photo-Electronic Integrated Systems
3. Wafer bonding technology for optoelectronic integrated devices
4. InGaAs/InP double heterostructures on InP/Si templates fabricated by wafer bonding and hydrogen-induced exfoliation
5. Silicon on insulator material technology
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