Optimization of YBa2Cu3O7−δsubmicrometer structure fabrication
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109807
Reference7 articles.
1. Submicron structuring of YBa2Cu3O7thin films with electron beam lithography
2. Fabrication of superconducting YBa2Cu3O7−δ submicron structures
3. Superconducting submicron bridges fabricated by electron beam lithography and dry etching
4. Off‐axis laser deposition of YBa2Cu3O7−δthin films
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