Author:
Lee Wen‐Yaung,Eldridge J. M.,Schwartz G. C.
Subject
General Physics and Astronomy
Cited by
69 articles.
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1. Etching Processes in Semiconductor Manufacturing;Materials Science and Technology;2013-02-15
2. Metallization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22
3. Corrosion in Microelectronics;Corrosion: Environments and Industries;2006
4. Effect of Si addition on the precipitation of Al2Cu-phase in Al-Cu-Si thin films;Journal of Materials Science;2005-08
5. Analyses of Post Metal Etch Cleaning in Downstream H 2 O ‐ Based Plasma Followed by a Wet Chemistry;Journal of The Electrochemical Society;1999-10-01