Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1818354
Reference31 articles.
1. Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell
2. Standing wave and skin effects in large-area, high-frequency capacitive discharges
3. SiO2 etching with perfluorobutadiene in a dual frequency plasma reactor
4. Dual radio frequency sources in a magnetized capacitively coupled plasma discharge
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