LiNbO3 thick films grown on sapphire by using a multistep sputtering process
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1378332
Reference20 articles.
1. Thin film lithium niobate on sapphire for SAW applications
2. Waveguiding epitaxial LiNbO3layers deposited by radio frequency sputtering
3. LiNbO3film with a new epitaxial orientation on R‐cut sapphire
4. Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputtering
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