Real-time in situ spectroscopic ellipsometry of GaSb nanostructures during sputtering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3133350
Reference19 articles.
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1. Vacuum ultraviolet optical properties of GaSb determined by synchrotron rotating analyzer ellipsometry: applications in nanopillars and plasmonics;Optical Materials Express;2023-04-27
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3. Solid-state dewetting of thin Au films studied with real-time, in situ spectroscopic ellipsometry;Applied Surface Science;2017-11
4. In situ optical characterizations of the annealing effects upon SnO2:F films by spectroscopic ellipsometry;Materials Research Express;2016-10-28
5. Combining surface X-ray scattering and ellipsometry for non-destructive characterization of ion beam-induced GaSb surface nanostructures;Thin Solid Films;2014-11
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