Current status of development of ion sources in Japan from a standpoint of materials science (invited)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1141239
Reference16 articles.
1. Axial magnetic field extraction‐type microwave ion source with a permanent magnet
2. Ion source with plasma cathode for ion assisted deposition
3. Development of high current metal ion beam source
4. Impregnated‐electrode‐type liquid metal ion source
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2. Simulation of the Formation of an Ion Beam by Extraction From a Magnetically Confined Plasma;IEEE Transactions on Plasma Science;2012-01
3. Experiments with a microwave plasma as a cathode for cold or hot reflex discharge ion source;Review of Scientific Instruments;2000-02
4. Ion beam modification of solids: towards intelligent materials;Materials Science and Engineering: A;1998-09
5. A broad beam cold cathode Penning ionization gauge ion source for ion‐beam‐assisted deposition;Review of Scientific Instruments;1996-10
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