Author:
Sekaric L.,Zalalutdinov M.,Turner S. W.,Zehnder A. T.,Parpia J. M.,Craighead H. G.
Subject
Physics and Astronomy (miscellaneous)
Cited by
26 articles.
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1. Resonant MEMS Accelerometer With CW Laser Excitation;Journal of Microelectromechanical Systems;2020-10
2. Mechanical Superheterodyne and Its Use for Low Frequency Vibrations Sensing;Journal of Microelectromechanical Systems;2019-06
3. Piezoresistive microcantilevers for humidity sensing;Journal of Micromechanics and Microengineering;2019-04-04
4. Nanotechnology and nanomaterials;Nanocomposite Structures and Dispersions;2019
5. MEMS/NEMS Devices and Applications;Springer Handbook of Nanotechnology;2017