Physico‐chemical changes ina‐C:H by MeV He ion irradiation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.356431
Reference15 articles.
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1. Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006
2. Correlation of hydrogen content with the microstructure of a-C:H films;Physica B: Condensed Matter;2005-01
3. The irradiation studies on diamond-like carbon films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-11
4. Structural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing;Diamond and Related Materials;2000-09
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