Electron and chemical kinetics in methane rf glow‐discharge deposition plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343378
Reference26 articles.
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4. Radiolysis of Methane in a Wide‐Range Radiolysis Source of a Mass Spectrometer. I. Individual and Total Cross Sections for the Production of Positive Ions, Negative Ions, and Free Radicals by Electrons
5. Negative Ion Kinetics in RF Glow Discharges
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