Microwave power coupling in a surface wave excited plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/adva/5/1/1.4905713.pdf?itemId=/content/aip/journal/adva/5/1/10.1063/1.4905713&mimeType=pdf&containerItemId=content/aip/journal/adva
Reference29 articles.
1. Fine structure of the electromagnetic fields formed by backward surface waves in an azimuthally symmetric surface wave-excited plasma source
2. Production of large-area surface-wave plasmas with an internally mounted planar cylindrical launcher
3. Production of Low-Pressure Planar Non-Magnetized Plasmas Sustained under a Dielectric-Free Metal-Plasma Interface
4. High-density flat plasma production based on surface waves
5. Characteristics of the planar plasma source sustained by microwave power
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