Ambient gas effects on debris formed during KrF laser ablation of polyimide
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107223
Reference18 articles.
1. CO2 laser cleaning of black deposits formed during the excimer laser etching of polyimide in air
2. Laser ablation of polymers in pressurized gas ambients
3. The effect of debris formation on the morphology of excimer laser ablated polymers
4. XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology
5. XeCl laser ablation of polyimide: Influence of ambient atmosphere on particulate and gaseous products
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