Thermal and ion irradiation stability of direct current sputtered TiN/B–C–N multilayers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118496
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5. In Situ Study of Stresses in Ag/Cu Thin Film Multilayers During Deposition
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Size-dependent radiation tolerance in ion irradiated TiN/AlN nanolayer films;Journal of Nuclear Materials;2013-10
2. Ion irradiation stability of multilayered AlN/TiN nanocomposites;Journal of Physics D: Applied Physics;2010-01-25
3. Thermal annealing, irradiation, and stress in multilayers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-01
4. Stress-related interdiffusion in dc sputtered TiN/B–C–N multilayers;Applied Physics Letters;1998-08-24
5. Research on carbon nitrides;Progress in Materials Science;1997-12
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