Ultrahigh-density, nonlithographic, sub-100 nm pattern transfer by ion implantation and selective chemical etching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1527693
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1. Ordered Metal Nanohole Arrays Made by a Two-Step Replication of Honeycomb Structures of Anodic Alumina
2. Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask
3. Ordered Two-Dimensional Nanowire Array Formation Using Self-Organized Nanoholes of Anodically Oxidized Aluminum
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