Single impact crater functions for ion bombardment of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2905297
Reference32 articles.
1. Spontaneous Pattern Formation on Ion Bombarded Si(001)
2. Nanopatterning of silicon surfaces by low-energy ion-beam sputtering: dependence on the angle of ion incidence
3. Roughness Evolution of Ion Sputtered Rotating InP Surfaces: Pattern Formation and Scaling Laws
4. Ion bombardment induced morphology modifications on self-organized semiconductor surfaces
5. Lateral templating of self-organized ripple morphologies during focused ion beam milling of Ge
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