Influence of the nucleation process on the azimuthal misorientation of heteroepitaxial diamond films on Si(001)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364343
Reference17 articles.
1. Generation of diamond nuclei by electric field in plasma chemical vapor deposition
2. Textured diamond growth on (100) β‐SiC via microwave plasma chemical vapor deposition
3. Epitaxial diamond thin films on (001) silicon substrates
4. Oriented nucleation and growth of diamond films on β‐SiC and Si
5. The influence of the growth process on the film texture of epitaxially nucleated diamond on silicon (001)
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