An algorithm for computing linear four-point probe thickness correction factors
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1394186
Reference5 articles.
1. Effect of Electrode Spacing on the Equivalent Base Resistance of Point-Contact Transistors
2. Resistivity Measurements on Germanium for Transistors
3. An Alternative Approach to the Calculation of Four‐Probe Resistances on Nonuniform Structures
4. Verification of the Relation Between Two‐Probe and Four‐Probe Resistances as Measured on Silicon Wafers
5. The Potentials of Infinite Systems of Sources and Numerical Solutions of Problems in Semiconductor Engineering
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