A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points
Author:
Affiliation:
1. Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands
2. Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, The Netherlands
Publisher
AIP Publishing
Subject
Instrumentation
Reference20 articles.
1. Toward accurate metrology with scanning force microscopes
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