Author:
Ibuki Toshio,Kono Mituhiko,Asari Yukiko,Hiraya Atsunari,Shobatake Kosuke
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Cited by
13 articles.
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1. Real-time monitoring of atomic layer etching in Cl2/Ar pulsed gas, pulsed power plasmas by optical emission spectroscopy;Journal of Vacuum Science & Technology A;2023-04-27
2. Dipole properties of PH3, PF3, PF5, PCl3, SiCl4, GeCl4, and SnCl4;Molecular Physics;2016-02-08
3. Measurement of the absorption cross sections of SiCl4, SiCl3, SiCl2 and Cl at H Lyman- wavelength;Chemical Physics Letters;2013-03
4. Electronic properties, doping, and defects in chlorinated silicon nanocrystals;Physical Review B;2012-07-09
5. Negative ion formation from photoexcited carbon tetrachloride and silicon tetrachloride studied by negative-ion mass spectrometry in the range of 12.4–31.0eV;Journal of Electron Spectroscopy and Related Phenomena;2008-04