The use of thermally stimulated ionic currents with a hyperbolic heating rate to measure sodium motion in rf‐sputtered SiO2films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1654633
Reference16 articles.
1. Ion Transport Phenomena in Insulating Films
2. Sodium Ion Drift through Phosphosilicate Glass-SiO[sub 2] Films
3. Sodium distribution in thermal oxide on silicon by radiochemical and MOS analysis
4. Proton and sodium transport in SiO2films
5. Dielectric Thin Films through rf Sputtering
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