Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373005
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1. Future evolution of DRAM and its materials
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3. SrTiO3 thin films by mocvd for 1 gbit DRAM application
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