Computer‐assisted optical emission tomography in a radiofrequency capacitively coupled plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.117882
Reference12 articles.
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Evaluation of the spatial structure of multiline emission in a capacitively coupled plasma using tomographic reconstruction;Japanese Journal of Applied Physics;2024-05-01
2. Investigation of Single and Dual RF Capacitively Coupled Nitrogen Plasma Discharges Using Optical Emission Spectroscopy;IEEE Transactions on Plasma Science;2014-08
3. An overview of diagnostic methods of low-pressure capacitively coupled plasmas;Thin Solid Films;2012-10
4. Three-dimensional fluid simulations on a line-shaped microwave plasma;Plasma Sources Science and Technology;2010-11-23
5. Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines;Applied Physics Letters;2010-03-15
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