Tracking and dynamic control of the angular alignment position in a photolithographic mask aligner by the moiré interference technique
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1145605
Reference5 articles.
1. Photolithographic Mask Alignment Using Moiré Techniques
2. Novel on-axis interferometric alignment method with sub-10 nm precision
3. An automatic mask alignment technique using moiré interference
4. Moiré signals in reflection
5. Measurement of small angular displacement by a modified moire technique
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