Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371318
Reference38 articles.
1. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
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4. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
5. Surface reactions during growth and erosion of hydrocarbon films
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