Enhanced adhesion at oxide/oxide interfaces by ion beam stitching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99425
Reference21 articles.
1. Ion-beam-enhanced adhesion in the electronic stopping region
2. Enhanced adhesion from high energy ion irradiation
3. Surface modification using MeV ion beams
4. Ion Beam Enhanced Adhesion of Thin Films
5. Effects on Metal/Metal-Oxide Interface Adhesion Due to Electron and Ion Irradiation
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2. Light-ion-irradiation-induced thermal spikes in nanoporous silica;Journal of Physics D: Applied Physics;2011-02-10
3. Synthesis of thin films using energetic ions;Engineered Nanostructural Films and Materials;1999-06-30
4. A scratch-resistant single-layer antireflective coating by a low temperature sol-gel route;Journal of Sol-Gel Science and Technology;1994
5. Ion mixing enhanced wafer bonding for silicon‐on‐insulator structures;Journal of Applied Physics;1992-12-15
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