Electron‐energy distribution function measurements in capacitively coupled rf discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348935
Reference16 articles.
1. Electron energy distribution functions in radio-frequency collision dominated nitrogen discharges
2. Mechanisms for Power Deposition in Ar/SiH4 Capacitively Coupled RF Discharges
3. Electron heating mechanisms in helium rf glow discharges: A self-consistent kinetic calculation
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