Plasmonic titanium nitride via atomic layer deposition: A low-temperature route
Author:
Affiliation:
1. Department of Electrical and Computer Engineering, Virginia Commonwealth University, Richmond, Virginia 23220, USA
Funder
Virginia Microelectronic Consortiem
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5130889
Reference42 articles.
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