1. National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 1 , 865 Changning Road, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences 2 , Beijing 100049, China
3. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology 3 , Shanghai 200093, China
4. School of Physical Science and Technology, Southwest University 4 , Chongqing 400715, China