1. School of Semiconductor Science and Technology, South China Normal University 1 , Foshan 528225, People's Republic of China
2. School of Physics and Optoelectronic Engineering, Guangdong University of Technology 2 , Guangzhou 510006, China
3. Key Laboratory of Nondestructive Testing, Ministry of Education, Nanchang HangKong University 3 , Nanchang 330063, China
4. Provincial Key Laboratory of Chip and Integration Technology 4 , Guangzhou 510631, People's Republic of China