Electrostatic probe measurements for microwave plasma‐assisted chemical vapor deposition of diamond
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105683
Reference13 articles.
1. Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases
2. Diamond-Ceramic Coating of the Future
3. Current Issues and Problems in the Chemical Vapor Deposition of Diamond
4. Examination of the chemistry involved in microwave plasma assisted chemical vapor deposition of diamond
5. Characterization of diamond films by thermogravimetric analysis and infrared spectroscopy
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2. Determining electron temperature and electron density in moderate pressure H2/CH4microwave plasma;Journal of Physics D: Applied Physics;2014-05-01
3. Nanocrystalline diamond growth in a surface-wave plasma;Diamond and Related Materials;2011-05
4. Nanocrystalline diamond film growth on plastic substrates at temperatures below100 °Cfrom low-temperature plasma;Physical Review B;2010-09-30
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