Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes
Author:
Funder
DFG
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4879283
Reference18 articles.
1. Integration of lead zirconium titanate thin films for high density ferroelectric random access memory
2. A Low-Voltage 1 Mb FRAM in 0.13 $\mu$m CMOS Featuring Time-to-Digital Sensing for Expanded Operating Margin
3. Ferroelectricity in hafnium oxide thin films
4. Ferroelectricity in yttrium-doped hafnium oxide
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