Optical emission study of a doped diamond deposition process by plasma enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2949271
Reference48 articles.
1. Analytical studies on multiple delta doping in diamond thin films for efficient hole excitation and conductivity enhancement
2. Pulse-doped diamond p-channel metal semiconductor field-effect transistor
3. Diamond field effect transistors—concepts and challenges
4. δ-Doping in diamond
5. High-temperature, high-voltage operation of pulse-doped diamond MESFET
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